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Hydrothermally deposited PZT thin film vibration probe sensor
Description
We have fabricated a touch probe sensor using PZT thin film vibrator. This sensor was designed with the aim of realizing high resolution more than 0.5 nm, low contact force under 100 nN, a wide scanning range in mm scale square and quick scanning surface profile measurement. These features have advantages in measuring nano structure, for example sub micron rule VLSI or micro electro mechanical systems (MEMS). The sensitivity and resolution were 2.0/spl times/10/sup -2/ mV/nm and 2.4 nm. The sensor device was installed in AFM. Then an image of surface texture was obtained.
Journal
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- 2002 IEEE Ultrasonics Symposium, 2002. Proceedings.
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2002 IEEE Ultrasonics Symposium, 2002. Proceedings. 449-452, 2003-10-01
IEEE