AFM and TEM measurement of the microscopic surface structure of a quartz substrate
説明
In this paper, we investigate the surface damage on commercially available ST-cut quartz by measuring microscopic features using atomic force microscopy (AFM) and transmission electron microscopy (TEM). The experimental results showed that the top surface of the sample is sufficiently flat with roughness of less than around 2 A and that the particles were ordered relatively near in one direction. However, the particle image seemed to indicate amorphous structure rather than crystalline structure of ST-cut quartz. The measurement data shows that there exists a heterogeneous damage layer at a depth of about 30 nm.
収録刊行物
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- 1997 IEEE Ultrasonics Symposium Proceedings. An International Symposium (Cat. No.97CH36118)
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1997 IEEE Ultrasonics Symposium Proceedings. An International Symposium (Cat. No.97CH36118) 1 285-288, 2002-11-22
IEEE
