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Statistical modeling of device characteristics with systematic fluctuation
Description
The fluctuations of device characteristics are usually regarded as a normal distribution. However, if we consider the fluctuation over the whole wafer, the fluctuation cannot be expressed as a normal distribution due to the existence of a systematic component. We propose a model, characterizing the systematic component according to the distance from the center die, which can express the fluctuation over the whole wafer statistically.
Journal
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- 2000 IEEE International Symposium on Circuits and Systems. Emerging Technologies for the 21st Century. Proceedings (IEEE Cat No.00CH36353)
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2000 IEEE International Symposium on Circuits and Systems. Emerging Technologies for the 21st Century. Proceedings (IEEE Cat No.00CH36353) 2 437-440, 2002-11-07
Presses Polytech. Univ. Romandes