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Resist Development Process For Sub-0.15/spl mu/m Lithography By KrF Imaging
Journal
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- Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135)
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Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135) 319-320, 1998-01-01
IEEE
