Nanometer Positioning Characteristics of Closed Looped Differential Hydro-or Aerostatic Actuator

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Description

Summary Error correcting devices for motion accuracy are important for developing ultra-precision machine tools overcoming restriction of motion accuracy in the conventional machine tools. Such devices have to be qualified for higher resolution of motion and stiffness than in the conventional mechanism. Proposed closed looped differential hydro-or aerostatic actuator has a resolution of nanometer, a stiffness of several 10 kN/μm and a range of ±30 μm for hydrostatic actuator and ±10 μm for aerostatic. The basic construction and the performance of the actuator are presented.

Journal

  • CIRP Annals

    CIRP Annals 32 287-289, 1983-01-01

    Elsevier BV

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