<title>Lateral-periodicity evaluation of multilayer Bragg reflector surface roughness using x-ray diffraction</title>

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The lateral-periodicities of the surface and interfacial roughnesses of a multilayer- Bragg reflector which affect x-ray reflectivity have been examined using the x-ray rocking curve profile measurements and a stylus surface profilometer. Multilayered films have been fabricated by a proprietary sputtering technique. The x-ray rocking curve profiles of the first Bragg reflection of the multilayered films have been examined with a precision x-ray diffractometer. These profiles show that the lateral-periodicity of the film surface and interfacial roughness which primarily affect the CuKa X-ray reflectivity is about 4 rim. The measured CuKa x-ray reflectivity of the multilayered film is in good agreement with calculations which incorporate the estimated film surface and interfacial roughness. 1.© (1991) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.

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Details 詳細情報について

  • CRID
    1873398392920716544
  • DOI
    10.1117/12.23313
  • ISSN
    0277786X
  • Data Source
    • OpenAIRE

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