Amorphous carbon film preparation by shunting arc discharge in vacuum
説明
Diamond-like carbon film (DLC) was deposited by PBII&D method using a carbon shunting arc discharge in vacuum. The prepared film was in a state of amorphous and its surface is clean and smooth. A pulse or DC voltage of 0 to -15 kV is applied to the substrate with any filtering method to eliminate droplets. A future prospect of the various film preparations using the shunting arc discharge was also discussed.
収録刊行物
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- Digest of Technical Papers. PPC-2003. 14th IEEE International Pulsed Power Conference (IEEE Cat. No.03CH37472)
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Digest of Technical Papers. PPC-2003. 14th IEEE International Pulsed Power Conference (IEEE Cat. No.03CH37472) 1 567-570, 2004-07-08
IEEE
