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New method for Characterizing Dielectric Properties of High-k Films Using Time-Dependent Open-Circuit Potential Measurement
Bibliographic Information
- Title
- New method for Characterizing Dielectric Properties of High-k Films Using Time-Dependent Open-Circuit Potential Measurement
- Author
- K.Kita M.Sasagawa, K.Kyuno, A.Toriumi
Journal
-
- Ext.Abst.Int.Conf. Solid State Dev.Mater. (SSDM)
-
Ext.Abst.Int.Conf. Solid State Dev.Mater. (SSDM) 66-67, 2002
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Details 詳細情報について
-
- CRID
- 1010000781772371840
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN
