New method for Characterizing Dielectric Properties of High-k Films Using Time-Dependent Open-Circuit Potential Measurement
書誌事項
- タイトル
- New method for Characterizing Dielectric Properties of High-k Films Using Time-Dependent Open-Circuit Potential Measurement
- 著者
- K.Kita M.Sasagawa, K.Kyuno, A.Toriumi
収録刊行物
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- Ext.Abst.Int.Conf. Solid State Dev.Mater. (SSDM)
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Ext.Abst.Int.Conf. Solid State Dev.Mater. (SSDM) 66-67, 2002