High-speed and Accurate Profile Measurement and Defect by Scanning Moire Method Using Linear Sensors

Bibliographic Information

Title
High-speed and Accurate Profile Measurement and Defect by Scanning Moire Method Using Linear Sensors
Author
Yoneyama, S.

Journal

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Details

  • CRID
    1010000781776676618
  • Article Type
    journal article
  • Data Source
    • KAKEN

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