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High-speed and Accurate Profile Measurement and Defect by Scanning Moire Method Using Linear Sensors
Bibliographic Information
- Title
- High-speed and Accurate Profile Measurement and Defect by Scanning Moire Method Using Linear Sensors
- Author
- Yoneyama, S.
- Published
- 2002
- Resource Type
- journal article
Journal
-
- Journal of JSNDI Vol.51, No.7, Inspection
-
Journal of JSNDI Vol.51, No.7, Inspection 420-424, 2002
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Details 詳細情報について
-
- CRID
- 1010000781776676618
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN
