High-speed and Accurate Profile Measurement and Defect by Scanning Moire Method Using Linear Sensors
Bibliographic Information
- Title
- High-speed and Accurate Profile Measurement and Defect by Scanning Moire Method Using Linear Sensors
- Author
- Yoneyama, S.
Journal
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- Journal of JSNDI Vol.51, No.7, Inspection
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Journal of JSNDI Vol.51, No.7, Inspection 420-424, 2002
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Details 詳細情報について
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- CRID
- 1010000781776676618
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- Article Type
- journal article
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- Data Source
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- KAKEN