High-speed and Accurate Profile Measurement and Defect by Scanning Moire Method Using Linear Sensors
書誌事項
- タイトル
- High-speed and Accurate Profile Measurement and Defect by Scanning Moire Method Using Linear Sensors
- 著者
- Yoneyama, S.
収録刊行物
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- Journal of JSNDI Vol.51, No.7, Inspection
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Journal of JSNDI Vol.51, No.7, Inspection 420-424, 2002
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詳細情報
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- CRID
- 1010000781776676618
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- 資料種別
- journal article
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- データソース種別
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- KAKEN