Surface Modification of TiN Films by Nitrogen Ion Beam Irradiation in Ethylene Gas Atmosphere
Bibliographic Information
- Title
- Surface Modification of TiN Films by Nitrogen Ion Beam Irradiation in Ethylene Gas Atmosphere
- Author
- I.Takano et al.
Journal
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- Vacuum Vol.74
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Vacuum Vol.74 659-663, 2004
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Details 詳細情報について
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- CRID
- 1010000781776681755
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- Article Type
- journal article
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- Data Source
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- KAKEN