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Developmento of Ultraprecision Positioning Device with 5nm Resolution
Bibliographic Information
- Title
- Developmento of Ultraprecision Positioning Device with 5nm Resolution
- Author
- J.Otsuka, S.ichikawa, K.Suzuki
Journal
-
- Measurement of Science and Technology (IOP) 16(to be published)
-
Measurement of Science and Technology (IOP) 16(to be published) 2005
- Tweet
Details 詳細情報について
-
- CRID
- 1010000781779540736
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN
