Developmento of Ultraprecision Positioning Device with 5nm Resolution
Bibliographic Information
- Title
- Developmento of Ultraprecision Positioning Device with 5nm Resolution
- Author
- J.Otsuka, S.ichikawa, K.Suzuki
Journal
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- Measurement of Science and Technology (IOP) 16(to be published)
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Measurement of Science and Technology (IOP) 16(to be published) 2005
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Details 詳細情報について
-
- CRID
- 1010000781779540736
-
- Article Type
- journal article
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- Data Source
-
- KAKEN
