Developmento of Ultraprecision Positioning Device with 5nm Resolution

Bibliographic Information

Title
Developmento of Ultraprecision Positioning Device with 5nm Resolution
Author
J.Otsuka, S.ichikawa, K.Suzuki

Journal

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Details 詳細情報について

  • CRID
    1010000781779540736
  • Article Type
    journal article
  • Data Source
    • KAKEN

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