Developmento of Ultraprecision Positioning Device with 5nm Resolution
書誌事項
- タイトル
- Developmento of Ultraprecision Positioning Device with 5nm Resolution
- 著者
- J.Otsuka, S.ichikawa, K.Suzuki
収録刊行物
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- Measurement of Science and Technology (IOP) 16(to be published)
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Measurement of Science and Technology (IOP) 16(to be published) 2005
