[Updated on Apr. 18] Integration of CiNii Articles into CiNii Research

Observation of Etching Reactions on SiO_2/Si Surface under Co-incidence of Fluorocarbon Molecule and Ion Beam (Invited)

Bibliographic Information

Title
Observation of Etching Reactions on SiO_2/Si Surface under Co-incidence of Fluorocarbon Molecule and Ion Beam (Invited)
Author
H.Toyoda

Journal

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Details

  • CRID
    1010000781812279683
  • Article Type
    journal article
  • Data Source
    • KAKEN

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