Observation of Etching Reactions on SiO_2/Si Surface under Co-incidence of Fluorocarbon Molecule and Ion Beam (Invited)
Bibliographic Information
- Title
- Observation of Etching Reactions on SiO_2/Si Surface under Co-incidence of Fluorocarbon Molecule and Ion Beam (Invited)
- Author
- H.Toyoda
Journal
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- 26th Int.Conf.on Phenomena in Ionized Gases
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26th Int.Conf.on Phenomena in Ionized Gases 137-138, 2003
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Details 詳細情報について
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- CRID
- 1010000781812279683
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- Article Type
- journal article
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- Data Source
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- KAKEN