A Study on Surface Integrity ofSiC/Si Hybrid Nano-Structured Surfaces
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- FURUKAWA Yuji
- Tokyo University of Agriculture and Technology, Graduate School of Technology Management, Professor
Bibliographic Information
- Title
- A Study on Surface Integrity ofSiC/Si Hybrid Nano-Structured Surfaces
- Author
- Kenichiro CHUMA, Yuji FURUKAWA, Yujie HAN, Akira KAKUTA
Journal
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- Int. Conf. on Leading Edge Manufacturing in 21^<St> century Vol. 1
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Int. Conf. on Leading Edge Manufacturing in 21^<St> century Vol. 1 1199-1204, 2005
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Details 詳細情報について
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- CRID
- 1010000781870634368
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- Article Type
- journal article
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- Data Source
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- KAKEN