[Updated on Apr. 18] Integration of CiNii Articles into CiNii Research

Thermal Stability of Nitrided Si Atomic Layer on Ge(100) Using Low Pressure CVD

Bibliographic Information

Title
Thermal Stability of Nitrided Si Atomic Layer on Ge(100) Using Low Pressure CVD
Author
N.Akiyama et al.

Journal

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Details

  • CRID
    1010000781874555034
  • Article Type
    journal article
  • Data Source
    • KAKEN

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