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マイクロサイズ曲げ試験によるMEMS用厚膜レジストSU-8の塑性変形挙動
ISHIYAMA Chiemi
Tokyo Institute of Technology, Precision and Intelligent Laboratory, Assistant Professor
HIGO Yakichi
Tokyo Institute of Technology, Precision and Intelligent Laboratory, Professor
Bibliographic Information
Title
マイクロサイズ曲げ試験によるMEMS用厚膜レジストSU-8の塑性変形挙動
Author
石山 千恵美, 松崎 純平, 肥後 矢吉
Journal
第54回高分子討論会予稿集 54・2
第54回高分子討論会予稿集 54・2 4837-4838, 2005
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CRID
1010000781941745408
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journal article
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KAKEN
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