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マイクロサイズ曲げ試験によるMEMS用厚膜レジストSU-8の塑性変形挙動

  • ISHIYAMA Chiemi
    Tokyo Institute of Technology, Precision and Intelligent Laboratory, Assistant Professor
  • HIGO Yakichi
    Tokyo Institute of Technology, Precision and Intelligent Laboratory, Professor

Bibliographic Information

Title
マイクロサイズ曲げ試験によるMEMS用厚膜レジストSU-8の塑性変形挙動
Author
石山 千恵美, 松崎 純平, 肥後 矢吉

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Details

  • CRID
    1010000781941745408
  • Article Type
    journal article
  • Data Source
    • KAKEN

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