Study of the electrical contact resistance of multi-contact MEMS relays fabricated using the MetalMUMPs process

Bibliographic Information

Title
Study of the electrical contact resistance of multi-contact MEMS relays fabricated using the MetalMUMPs process
Author
于強他4名

Journal

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Details 詳細情報について

  • CRID
    1010000781978377617
  • Article Type
    journal article
  • Data Source
    • KAKEN

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