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Study of the electrical contact resistance of multi-contact MEMS relays fabricated using the MetalMUMPs process
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- YU Qiang
- Yokohama National University
Bibliographic Information
- Title
- Study of the electrical contact resistance of multi-contact MEMS relays fabricated using the MetalMUMPs process
- Author
- 于強他4名
Journal
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- Journal of Micromechanics and Microengineering 16・-
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Journal of Micromechanics and Microengineering 16・- 1189-1194, 2007
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Details 詳細情報について
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- CRID
- 1010000781978377617
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- Article Type
- journal article
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- Data Source
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- KAKEN
