Study of the electrical contact resistance of multi-contact MEMS relays fabricated using the MetalMUMPs process
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- 于 強
- 横浜国立大学
書誌事項
- タイトル
- Study of the electrical contact resistance of multi-contact MEMS relays fabricated using the MetalMUMPs process
- 著者
- 于強他4名
収録刊行物
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- Journal of Micromechanics and Microengineering 16・-
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Journal of Micromechanics and Microengineering 16・- 1189-1194, 2007
