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Electrical and Structural Evaluations of Ultrathin SiGe and Ge-on-insulator Fabricated Using Ge Condensation by Dry Oxidation
Bibliographic Information
- Title
- Electrical and Structural Evaluations of Ultrathin SiGe and Ge-on-insulator Fabricated Using Ge Condensation by Dry Oxidation
- Author
- H. Yang, D. Wang, H. Gao, K. Hirayama, K. Ikeda, S. Hata, H. Nakashima, H. Nakashima
Journal
-
- Extended Abstracts of the 2008 International ronference on Solid State Devices and Materials
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Extended Abstracts of the 2008 International ronference on Solid State Devices and Materials 438-439, 2008
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Details 詳細情報について
-
- CRID
- 1010000782026200600
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN
