[Updated on Apr. 18] Integration of CiNii Articles into CiNii Research

Hexagonality and stacking sequence dependence of etching properties in Cl_2-O_2-SiC system

Bibliographic Information

Title
Hexagonality and stacking sequence dependence of etching properties in Cl_2-O_2-SiC system
Author
T.Hatayama, 他3名

Journal

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Details

  • CRID
    1010000782045205249
  • Article Type
    journal article
  • Data Source
    • KAKEN

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