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Influence of sputtering parameters on the crystallinity and crystal orientation of AIN layers deposited by RF sputtering using the AIN target
Bibliographic Information
- Title
- Influence of sputtering parameters on the crystallinity and crystal orientation of AIN layers deposited by RF sputtering using the AIN target
- Author
- Z.Vashaei
Journal
-
- Journal of Crystal Growth 311
-
Journal of Crystal Growth 311 459-462, 2009
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Details 詳細情報について
-
- CRID
- 1010000782053706639
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN
