Multi Patterning Techniques for Manufacturability Enhancement in Optical Lithography
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- Takahashi Atsushi
- 東京工業大学
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- KOHIRA YUKIHIDE
- 会津大学
Bibliographic Information
- Title
- Multi Patterning Techniques for Manufacturability Enhancement in Optical Lithography
- Author
- Atsushi Takahashi, Ahmed Awad, Yukihide Kohira, Tomomi Matsui, Chikaaki Kodama, Shigeki Nojima, Satoshi Tanaka
Journal
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- Proc. the 2014 International Conference on Integrated Circuits, Design, and Verification (ICDV 2014)
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Proc. the 2014 International Conference on Integrated Circuits, Design, and Verification (ICDV 2014) 2014 117-122, 2014
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Details
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- CRID
- 1010000782240027806
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- Article Type
- journal article
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- Data Source
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- KAKEN