Multi Patterning Techniques for Manufacturability Enhancement in Optical Lithography
-
- Takahashi Atsushi
- 東京工業大学
-
- KOHIRA YUKIHIDE
- 会津大学
Bibliographic Information
- Title
- Multi Patterning Techniques for Manufacturability Enhancement in Optical Lithography
- Author
- Atsushi Takahashi, Ahmed Awad, Yukihide Kohira, Tomomi Matsui, Chikaaki Kodama, Shigeki Nojima, Satoshi Tanaka
Journal
-
- Proc. the 2014 International Conference on Integrated Circuits, Design, and Verification (ICDV 2014)
-
Proc. the 2014 International Conference on Integrated Circuits, Design, and Verification (ICDV 2014) 2014 117-122, 2014
- Tweet
Details 詳細情報について
-
- CRID
- 1010000782240027806
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN