Multi Patterning Techniques for Manufacturability Enhancement in Optical Lithography
書誌事項
- タイトル
- Multi Patterning Techniques for Manufacturability Enhancement in Optical Lithography
- 著者
- Atsushi Takahashi, Ahmed Awad, Yukihide Kohira, Tomomi Matsui, Chikaaki Kodama, Shigeki Nojima, Satoshi Tanaka
収録刊行物
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- Proc. the 2014 International Conference on Integrated Circuits, Design, and Verification (ICDV 2014)
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Proc. the 2014 International Conference on Integrated Circuits, Design, and Verification (ICDV 2014) 2014 117-122, 2014