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Reliability of low temperature poly-Si Thin Film Transistors with ultrathin gate oxide
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- YANO Hiroshi
- 奈良先端科学技術大学院大学
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- YUKIHARU Uraoka
- Nara Institute of Science and Technology
Bibliographic Information
- Title
- Reliability of low temperature poly-Si Thin Film Transistors with ultrathin gate oxide
- Author
- Hitoshi Ueno, Yuta Sugawara, Hiroshi Yano, Tomoaki Hatayama, Yukiharu Uraoka, Takashi Fuyuki, Tadashi Serikawa
Journal
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- pn. J. Appl. Phys. Vol.46,No.7A
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pn. J. Appl. Phys. Vol.46,No.7A 2007
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Details 詳細情報について
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- CRID
- 1010000782440670866
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- Article Type
- journal article
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- Data Source
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- KAKEN
