Reliability of low temperature poly-Si Thin Film Transistors with ultrathin gate oxide
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- 浦岡 行治
- 18063015
書誌事項
- タイトル
- Reliability of low temperature poly-Si Thin Film Transistors with ultrathin gate oxide
- 著者
- Hitoshi Ueno, Yuta Sugawara, Hiroshi Yano, Tomoaki Hatayama, Yukiharu Uraoka, Takashi Fuyuki, Tadashi Serikawa
収録刊行物
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- pn. J. Appl. Phys. Vol.46,No.7A
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pn. J. Appl. Phys. Vol.46,No.7A 2007