Damage characterization of low-k layers through Cu damascene process using monoenergetic positron beams
Bibliographic Information
- Title
- Damage characterization of low-k layers through Cu damascene process using monoenergetic positron beams
- Author
- A.Uedono, et al.
Journal
-
- Proc.13th IEEE Int.Interconnect Tech.Conf.
-
Proc.13th IEEE Int.Interconnect Tech.Conf. 2010
