Damage characterization of low-k layers through Cu damascene process using monoenergetic positron beams
Bibliographic Information
- Title
- Damage characterization of low-k layers through Cu damascene process using monoenergetic positron beams
- Author
- A.Uedono, et al.
Journal
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- Proc.13th IEEE Int.Interconnect Tech.Conf.
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Proc.13th IEEE Int.Interconnect Tech.Conf. 2010
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Details 詳細情報について
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- CRID
- 1010000782466252565
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- Article Type
- journal article
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- Data Source
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- KAKEN