Damage characterization of low-k layers through Cu damascene process using monoenergetic positron beams
書誌事項
- タイトル
- Damage characterization of low-k layers through Cu damascene process using monoenergetic positron beams
- 著者
- A.Uedono, et al.
収録刊行物
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- Proc.13th IEEE Int.Interconnect Tech.Conf.
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Proc.13th IEEE Int.Interconnect Tech.Conf. 2010
