Estimation of optimum ion energy for the reduction of resistivity in bias sputtering of ITO thin films
Bibliographic Information
- Title
- Estimation of optimum ion energy for the reduction of resistivity in bias sputtering of ITO thin films
- Author
- K. Ishii, Y. Saitou, K. Furutani, H. Sakuma, Y. Ikeda
Journal
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- IEICE TRANSACTIONS on Electronics vol. E91-C
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IEICE TRANSACTIONS on Electronics vol. E91-C 1653-1657, 2008
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Details 詳細情報について
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- CRID
- 1010000782475400964
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- Article Type
- journal article
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- Data Source
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- KAKEN