Estimation of optimum ion energy for the reduction of resistivity in bias sputtering of ITO thin films

Bibliographic Information

Title
Estimation of optimum ion energy for the reduction of resistivity in bias sputtering of ITO thin films
Author
K. Ishii, Y. Saitou, K. Furutani, H. Sakuma, Y. Ikeda

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Details 詳細情報について

  • CRID
    1010000782475400964
  • Article Type
    journal article
  • Data Source
    • KAKEN

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