Electrical Characteristics and Zirconia Film Preparation by a Zirconium-Oxygen Plasma using a Positively Biased Electrode
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- 須田 善行
- 豊橋技術科学大学
書誌事項
- タイトル
- Electrical Characteristics and Zirconia Film Preparation by a Zirconium-Oxygen Plasma using a Positively Biased Electrode
- 著者
- 行村建, 明石周平, 須田善行, Xinxin Ma, 池畑隆
収録刊行物
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- Plasma Process. Polym. 4
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Plasma Process. Polym. 4 2007