High Rate Growth of Highly-Crystallized Ge Films on Quartz from VHF Inductively-Coupled Plasma of GeH_4 + H_2
Bibliographic Information
- Title
- High Rate Growth of Highly-Crystallized Ge Films on Quartz from VHF Inductively-Coupled Plasma of GeH_4 + H_2
- Author
- T. Sakata
Journal
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- Materials Science Forum 561-565
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Materials Science Forum 561-565 1209-1212, 2007
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Details 詳細情報について
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- CRID
- 1010282256614327058
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- Article Type
- journal article
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- Data Source
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- KAKEN