Deposition of highly stable a-Si:H films using cluster-eliminating filter
書誌事項
- タイトル
- Deposition of highly stable a-Si:H films using cluster-eliminating filter
- 著者
- Kazunori Koga, Naoto Kaguchi, Kouki Bando, Masaharu Shiratani, Yukio Watanabe
収録刊行物
-
- Proceedings of Plasma Science Symposium 2005 and The 22nd Symposium on Plasma Processing
-
Proceedings of Plasma Science Symposium 2005 and The 22nd Symposium on Plasma Processing 157-158, 2005