Deposition of highly stable a-Si : H films using cluster-eliminating filter
Bibliographic Information
- Title
- Deposition of highly stable a-Si : H films using cluster-eliminating filter
- Author
- Kazunori Koga, Naoto Kaguchi, Kouki Bando, Masaharu Shiratani, Yukio Watanabe
Journal
-
- Proceedings of Plasma Science Symposium 2005 and The 22nd Symposium on Plasma Processing
-
Proceedings of Plasma Science Symposium 2005 and The 22nd Symposium on Plasma Processing 157-158, 2005
