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Deposition of highly stable a-Si:H films using cluster-eliminating filter
Bibliographic Information
- Title
- Deposition of highly stable a-Si:H films using cluster-eliminating filter
- Author
- Kazunori Koga, Naoto Kaguchi, Kouki Bando, Masaharu Shiratani, Yukio Watanabe
Journal
-
- Proceedings of Plasma Science Symposium 2005 and The 22nd Symposium on Plasma Processing
-
Proceedings of Plasma Science Symposium 2005 and The 22nd Symposium on Plasma Processing 157-158, 2005
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Details 詳細情報について
-
- CRID
- 1010282256753462146
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN
