[Updated on Apr. 18] Integration of CiNii Articles into CiNii Research

Evaluation of contribution of higher-order silane radicals in silane discharges to Si-H_2 bond formation in a-Si:H films

Bibliographic Information

Title
Evaluation of contribution of higher-order silane radicals in silane discharges to Si-H_2 bond formation in a-Si:H films
Author
Kazunori Koga, Naoto Kaguchi, Masaharu Shiratani, Yukio Watanabe

Journal

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Details

  • CRID
    1010282256753462152
  • Article Type
    journal article
  • Data Source
    • KAKEN

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