Evaluation of contribution of higher-order silane radicals in silane discharges to Si-H_2 bond formation in a-Si:H films
Bibliographic Information
- Title
- Evaluation of contribution of higher-order silane radicals in silane discharges to Si-H_2 bond formation in a-Si:H films
- Author
- Kazunori Koga, Naoto Kaguchi, Masaharu Shiratani, Yukio Watanabe
Journal
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- Proceedings of International Symposium on Novel Materials Processing by Advanced Electromagnetic Energy Sources (in press)
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Proceedings of International Symposium on Novel Materials Processing by Advanced Electromagnetic Energy Sources (in press) 2004
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Details 詳細情報について
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- CRID
- 1010282256753462152
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- Article Type
- journal article
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- Data Source
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- KAKEN