Piezoelectric microactuators composed of PZT thin films on Si substrates
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- KANNO Isaku
- Kyoto Univ., Dept.of Mechanical eng., Associate Professor
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- SUZIKI Takaaki
- Kyoto Univ., Dept.of Mechanical eng., Assistant Professor
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- KOTERA Hidetoshi
- Kyoto Univ., Dept.of Mechanical eng., professor
Bibliographic Information
- Title
- Piezoelectric microactuators composed of PZT thin films on Si substrates
- Author
- Isaku Kanno, Yoshiro Tazawa, Takaaki Kunisawa, Takaaki Suzuki, Hidetoshi Kotera
Journal
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- 2006 ASME/JSME Joint Conference on Micromechatronics for Information and Precision Equipment (MIPE2006)
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2006 ASME/JSME Joint Conference on Micromechatronics for Information and Precision Equipment (MIPE2006) 2006
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Details 詳細情報について
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- CRID
- 1010282256777470218
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- Article Type
- journal article
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- Data Source
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- KAKEN