A Basic Study on CMP Mechanism and a Trial to produce CMP Slurry by Sol-gel Method
書誌事項
- タイトル
- A Basic Study on CMP Mechanism and a Trial to produce CMP Slurry by Sol-gel Method
- 著者
- J.SHIBATA, M.OHTA, A.Oda
収録刊行物
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- Advances in Abrasive Technology -7^<th> International Symposium in Abrasives
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Advances in Abrasive Technology -7^<th> International Symposium in Abrasives 389-392, 2004