The flux control of ion incident upon the substrate in oxygen plasma for ZnO film synthesis based on mass-selective momentum control
Bibliographic Information
- Title
- The flux control of ion incident upon the substrate in oxygen plasma for ZnO film synthesis based on mass-selective momentum control
- Author
- N. Y. Sato, K. Kinoshita, Y. Nakano, T. Lkehata, S. Yamauchi and J. Oonuki
Journal
-
- Proceeding of the 6th International Conference on Reactive Plasmas and 23nd Symposium on Plasma Processing AP061201・P-1A-06
-
Proceeding of the 6th International Conference on Reactive Plasmas and 23nd Symposium on Plasma Processing AP061201・P-1A-06 171-172, 2006
- Tweet
Details
-
- CRID
- 1010282256852030470
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN
