The flux control of ion incident upon the substrate in oxygen plasma for ZnO film synthesis based on mass-selective momentum control
書誌事項
- タイトル
- The flux control of ion incident upon the substrate in oxygen plasma for ZnO film synthesis based on mass-selective momentum control
- 著者
- N. Y. Sato, K. Kinoshita, Y. Nakano, T. Lkehata, S. Yamauchi and J. Oonuki
収録刊行物
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- Proceeding of the 6th International Conference on Reactive Plasmas and 23nd Symposium on Plasma Processing AP061201・P-1A-06
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Proceeding of the 6th International Conference on Reactive Plasmas and 23nd Symposium on Plasma Processing AP061201・P-1A-06 171-172, 2006