The flux control of ion incident upon the substrate in oxygen plasma for ZnO film synthesis based on mass-selective momentum control
Bibliographic Information
- Title
- The flux control of ion incident upon the substrate in oxygen plasma for ZnO film synthesis based on mass-selective momentum control
- Author
- N. Y. Sato, K. Kinoshita, Y. Nakano, T. Lkehata, S. Yamauchi and J. Oonuki
Journal
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- Proceeding of the 6th International Conference on Reactive Plasmas and 23nd Symposium on Plasma Processing AP061201・P-1A-06
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Proceeding of the 6th International Conference on Reactive Plasmas and 23nd Symposium on Plasma Processing AP061201・P-1A-06 171-172, 2006
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Details 詳細情報について
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- CRID
- 1010282256852030470
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- Article Type
- journal article
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- Data Source
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- KAKEN