Measurement of Thin Film Elasticity Using Nanoscopic Contact Resonance of a Flat Tip in Sensitivity-Enhanced Atomic Force Acoustic Microscopy

Bibliographic Information

Title
Measurement of Thin Film Elasticity Using Nanoscopic Contact Resonance of a Flat Tip in Sensitivity-Enhanced Atomic Force Acoustic Microscopy
Author
M. Muraoka (S. Komatsu and F. Izumida)

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Details 詳細情報について

  • CRID
    1010282256906928263
  • Article Type
    journal article
  • Data Source
    • KAKEN

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