Measurement of Thin Film Elasticity Using Nanoscopic Contact Resonance of a Flat Tip in Sensitivity-Enhanced Atomic Force Acoustic Microscopy
Bibliographic Information
- Title
- Measurement of Thin Film Elasticity Using Nanoscopic Contact Resonance of a Flat Tip in Sensitivity-Enhanced Atomic Force Acoustic Microscopy
Journal
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- Proc. 2nd JSME/ASME International Conference on Materials and Processing(CD-ROM)
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Proc. 2nd JSME/ASME International Conference on Materials and Processing(CD-ROM) 1-5, 2005
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Details 詳細情報について
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- CRID
- 1010282256906928263
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- Article Type
- journal article
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- Data Source
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- KAKEN