Measurement of Thin Film Elasticity Using Nanoscopic Contact Resonance of a Flat Tip in Sensitivity-Enhanced Atomic Force Acoustic Microscopy
書誌事項
- タイトル
- Measurement of Thin Film Elasticity Using Nanoscopic Contact Resonance of a Flat Tip in Sensitivity-Enhanced Atomic Force Acoustic Microscopy
- 著者
- M. Muraoka (S. Komatsu and F. Izumida)
収録刊行物
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- Proc. 2nd JSME/ASME International Conference on Materials and Processing(CD-ROM)
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Proc. 2nd JSME/ASME International Conference on Materials and Processing(CD-ROM) 1-5, 2005