[Updated on Apr. 18] Integration of CiNii Articles into CiNii Research

Fabrication of Semi-Insulating GaN Wafers by Hydride Vapor Phase Epitaxy of Fe-Doped Thick GaN Layers Using GaAs Starting Substrates

Bibliographic Information

Title
Fabrication of Semi-Insulating GaN Wafers by Hydride Vapor Phase Epitaxy of Fe-Doped Thick GaN Layers Using GaAs Starting Substrates
Author
K.Takemoto, Y.Kumagai, H.Murakami, A.Koukitu

Journal

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Details

  • CRID
    1010282256927408387
  • Article Type
    journal article
  • Data Source
    • KAKEN

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