Effect of the radio-frequency power on the dielectric properties of hydrogen-containing boron carbon nitride films deposited by plasma-assisted chemical vapor deposition using tris(dimethylamino)boron gas
Bibliographic Information
- Title
- Effect of the radio-frequency power on the dielectric properties of hydrogen-containing boron carbon nitride films deposited by plasma-assisted chemical vapor deposition using tris(dimethylamino)boron gas
- Author
- Hidemitsu Aoki, Takuro Masuzumi, Makoto Hara, Daisuke Watanabe, Chiharu Kimura, Takashi Sugino
Journal
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- Thin Solid Films Vol.518 lssue8
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Thin Solid Films Vol.518 lssue8 2102-2104, 2010
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Details 詳細情報について
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- CRID
- 1010282257011907845
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- Article Type
- journal article
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- Data Source
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- KAKEN