[Updated on Apr. 18] Integration of CiNii Articles into CiNii Research

Effect of wafer pre-cleaning and plasma irradiation to wafer surfaces for plasma-assisted surface activated bonding

Bibliographic Information

Title
Effect of wafer pre-cleaning and plasma irradiation to wafer surfaces for plasma-assisted surface activated bonding
Author
R.Takei, K.Yoshida, T.Mizumoto

Journal

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Details

  • CRID
    1010282257082189829
  • Article Type
    journal article
  • Data Source
    • KAKEN

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